Information processing device, program, process treatment executing device, and information processing system

ABSTRACT

An information processing device includes: a recording means storing model data that reproduces a change of a workpiece, the model data being constructed, as an effect of process treatment, from differential data between initial state data and end state data of the workpiece, the end state data representing state of the workpiece to which the process treatment is applied under a predetermined process condition; an input receiving means for receiving an input of the initial state data and target end state data of the workpiece; a predicting means for predicting the end state data from the received initial state data, by using the model data and a combination of multiple model data in the recording means; and a determining means for determining a process condition of process treatment to be applied to the workpiece, based on a proximity between the predicted end state data and the target end state data.

TECHNICAL FIELD

The present invention relates to an information processing device, aprogram, a process treatment executing apparatus, and an informationprocessing system.

BACKGROUND

In conventional semiconductor manufacturing apparatuses, forming orsurface treatment has been made by performing a semiconductormanufacturing process, whose conditions are described as setting valuesof control components that constitute the semiconductor manufacturingapparatus.

For example, a method of generating process values of one or more inputvariables governing a plasma process sequence, from a final model and adesired surface profile, has been known (see Patent Document 1, forexample).

Also, there is known a method of optimizing a computerized model inwhich multiple model parameters are used to associate an etched featureprofile on a semiconductor device with a set of input independentparameters (see Patent Document 2, for example).

RELATED ART DOCUMENTS Patent Documents [Patent Document 1] JapaneseLaid-open Patent Application Publication No. 2010-282636 [PatentDocument 2] Japanese Laid-open Patent Application Publication No.2017-135365 SUMMARY Problem to be Solved by the Invention

However, in a conventional semiconductor manufacturing apparatus, forthe purpose of obtaining desired shape processing and surface treatment,a semiconductor manufacturing process has been performed under acondition described by using setting values (control setting values) forcontrol components constituting the semiconductor manufacturingapparatus. That is, the semiconductor manufacturing process has beencontrolled with the control setting values that are not direct to thepurpose. Controlling the semiconductor manufacturing process withcontrol setting values that are not direct to the purpose has been aproblem in that it slows down the development of devices. Such a problemarises not only in a semiconductor manufacturing apparatus, but also ina process treatment executing device in which process treatment isapplied to a workpiece under a predetermined process condition to changethe workpiece.

An embodiment of the present invention is intended to provide aninformation processing device capable of determining a predeterminedprocess condition of process treatment to be applied to a workpiece byinputting initial state data of the workpiece and target end state dataof the workpiece.

Means for Solving Problem

In order to solve the above-described problems, an informationprocessing device according to claim 1 includes: a recording meansconfigured to store a model data element that reproduces a change of aworkpiece, the model data being constructed, as an effect of processtreatment, from differential data between initial state data of theworkpiece and end state data of the workpiece, the end state data beingstate data of the workpiece to which the process treatment is appliedunder a predetermined process condition; an input receiving meansconfigured to receive an input of the initial state data of theworkpiece and target end state data of the workpiece; a predicting meansconfigured to predict the end state data of the workpiece from theinitial state data of the workpiece received by the input receivingmeans, by using the model data element and a combination of multiplemodel data elements that is recorded in the recording means; and adetermining means configured to determine a predetermined processcondition of process treatment to be applied to the workpiece, based ona proximity between the predicted end state data of the workpiece andthe target end state data of the workpiece received by the inputreceiving means.

Effect of Invention

According to the embodiment of the present invention, the predeterminedprocess conditions of the process treatment to be applied to a workpiececan be determined by inputting the initial state data of the workpieceand the target end state data of the workpiece.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram illustrating an example of an informationprocessing system according to a first embodiment;

FIG. 2 is a hardware configuration diagram of an example of thecomputer;

FIG. 3 is a functional block diagram illustrating an example of theinformation processing system according to the embodiment;

FIG. 4 is a block diagram illustrating an example of data related tosemiconductor manufacturing process treatment;

FIG. 5 is an explanatory diagram illustrating an example of a processfor calculating an effect of the semiconductor manufacturing processtreatment;

FIG. 6A is an explanatory diagram illustrating an example of a methodfor predicting change in state data of a workpiece;

FIG. 6B is an explanatory diagram illustrating an example of a methodfor predicting change in state data of a workpiece;

FIG. 7 is a flowchart illustrating an example of a process performed ina server apparatus;

FIG. 8A is a schematic diagram illustrating an example of a process ofreading out combinations of multiple model data elements;

FIG. 8B is a schematic diagram illustrating an example of a process ofreading out combinations of multiple model data elements;

FIG. 9 is a schematic diagram illustrating an example of a process ofreading out combinations of multiple model data elements;

FIG. 10 is a schematic diagram of an example of a prediction process;and

FIG. 11 is a schematic diagram illustrating an example of the processperformed in the server apparatus 10 according to the embodiment.

DESCRIPTION OF EMBODIMENTS

Hereinafter, embodiments of the present invention will be described withreference to the drawings. In the present embodiment, as an example of aprocess treatment executing device that applies process treatment to aworkpiece, an example of a semiconductor manufacturing apparatus thatapplies semiconductor manufacturing process treatment to a workpiecewill be described.

First Embodiment <System Configuration>

FIG. 1 is a block diagram illustrating an example of an informationprocessing system according to a first embodiment. In the informationprocessing system 1 of FIG. 1, a server apparatus 10, a client apparatus12, and a semiconductor manufacturing apparatus 14 are communicativelyconnected via a network 16 such as the Internet or a local area network(LAN).

The client apparatus 12 is an example of a device operated by a user.The client apparatus 12 receives, from the user, an input of initialstate data and target state data, which will be described below, andwhich are necessary for the server apparatus 10 to execute processing,and transmits the initial state data and the target state data to theserver apparatus 10. The client apparatus 12 also receives and displaysresults of the processing performed in the server apparatus 10.

The server apparatus 10 uses various model data elements to be describedbelow, each of which reproduces change of a workpiece and is constructedas an effect of semiconductor manufacturing process treatment, todetermine a model data element or a combination of multiple model dataelements, from which a result close to the target state data input fromthe client apparatus 12 can be obtained. The model data element may bestored in the server apparatus 10 in advance, or may be stored inanother device which is readable by the server apparatus 10 through thenetwork 16.

The server apparatus 10 selects, as an optimal solution, a model dataelement or a combination of the multiple model data elements, to bedescribed below, which changes the initial state data to end state datahaving a high degree of proximity to the target state data input fromthe client apparatus 12. The server apparatus 10 determines setting data(recipe parameters) included in the model data element selected as theoptimal solution, as setting values (control setting values) of controlcomponents constituting the semiconductor manufacturing apparatus.

The server apparatus 10 may output the determined control setting valuesto the client apparatus 12, to display the control setting values on theclient apparatus 12. The server apparatus 10 may also output thedetermined control setting values to the semiconductor manufacturingapparatus 14, to control semiconductor manufacturing process treatmentperformed by the semiconductor manufacturing apparatus 14. Thesemiconductor manufacturing apparatus 14 performs the semiconductormanufacturing process treatment based on the control setting valuesinput from the server apparatus 10.

Incidentally, the information processing system 1 illustrated in FIG. 1is an example, and it is obvious that there are various systemconfiguration examples depending on applications or purposes. Thecategorization of devices illustrated in FIG. 1, such as the serverapparatus 10, the client apparatus 12, and the semiconductormanufacturing apparatus 14, is an example. Various configurations arepossible, for example, a configuration in which at least two of theserver apparatus 10, the client apparatus 12, and the semiconductormanufacturing apparatus 14 are integrated, a configuration in which theserver apparatus 10 is divided, and the like.

Also, a configuration in which the semiconductor manufacturing apparatus14 is not connected to the network 16 may be employed. In such aconfiguration, the semiconductor manufacturing apparatus 14 may receivean input of the control setting values that are output by the serverapparatus 10, via a recording medium such as USB (Universal Serial Bus).

<Hardware Configuration>

The server apparatus 10 and the client apparatus 12 in the informationprocessing system 1 of FIG. 1 are each implemented by a computer havinga hardware configuration illustrated in, for example, FIG. 2. FIG. 2 isa hardware configuration diagram of an example of the computer.

The computer 500 of FIG. 2 includes an input device 501, a displaydevice 502, an external I/F (interface) 503, a RAM (Random AccessMemory) 504, a ROM (Read Only Memory) 505, a CPU (Central ProcessingUnit) 506, a communication I/F 507, and an HDD (Hard Disk Drive) 508,which are interconnected via a bus B. The input device 501 and thedisplay device 502 may be connected and utilized when necessary.

The input device 501 may include a keyboard, a mouse, a touch panel, orthe like, and is used by a user or the like to input operation signals.The display device 502 may be a display or the like, and displaysresults of processing by the computer 500. The communication I/F 507 isan interface that connects the computer 500 to a network. The HDD 508 isan example of a non-volatile memory device that stores programs anddata.

The external I/F 503 is an interface with an external device. Thecomputer 500 can read and/or write to a recording medium 503 a, such asan SD (Secure Digital) memory card, via the external I/F 503. The ROM505 is an example of a non-volatile semiconductor memory (memory device)in which programs and data are stored. The RAM 504 is an example of avolatile semiconductor memory (memory device) that temporarily retainsprograms and data.

The CPU 506 is an arithmetic device, which realizes overall control ofthe computer 500 and realizes functions, by loading the programs anddata into the RAM 504 from the memory device such as the ROM 505 or theHDD 508, and by performing processing. The server apparatus 10 and theclient apparatus 12 in the information processing system 1 of FIG. 1 canimplement various functions to be described below, by the hardwareconfiguration of the computer 500 of FIG. 2, for example.

<Functional Configuration>

The information processing system 1 according to the present embodimentis realized by, for example, functional blocks illustrated in FIG. 3.FIG. 3 is a functional block diagram illustrating an example of theinformation processing system according to the present embodiment. Inthe functional blocks illustrated in FIG. 3, functional blocks that arenot necessary for the description of the present embodiment are notillustrated.

The server apparatus 10 realizes a proxel recording unit 20, an inputreceiving unit 22, a predicting unit 24, a determining unit 26, and asetting value output unit 28, by executing a program for the serverapparatus 10. The client apparatus 12 realizes an initial state datainput unit 30, a target state data input unit 32, a data transmittingunit 34, and a result display unit 36, by executing a program for theclient apparatus 12. The semiconductor manufacturing apparatus 14implements a setting value input receiving unit 40, a condition inputunit 42, and a semiconductor manufacturing process control unit 44, byexecuting a program for the semiconductor manufacturing apparatus 14.

The initial state data input unit 30 of the client apparatus 12 receivesinput of the initial state data from a user. The initial state data isdata including three-dimensional structural information and materialinformation of a workpiece prior to semiconductor manufacturing processtreatment, which is modeled by, for example, shape modeling software.The initial state data may also be data including two-dimensionalstructural information and material information of a workpiece prior tosemiconductor manufacturing process treatment. Further, the initialstate data may be data including one-dimensional structural informationand material information, if it is possible to represent structuralinformation and material information of a workpiece prior tosemiconductor manufacturing process treatment.

The target state data input unit 32 receives an input of the targetstate data from the user. The target state data is data includingthree-dimensional structural information and material information of atarget workpiece after semiconductor manufacturing process treatment,which is modeled by, for example, shape modeling software. The targetstate data may be data including two-dimensional structural informationand material information of the target workpiece after the semiconductormanufacturing process treatment. The target state data may be dataincluding one-dimensional structural information and materialinformation if it is possible to represent structural information andmaterial information of a target workpiece after the semiconductormanufacturing process treatment.

The data transmitting unit 34 transmits, to the server apparatus 10, theinitial state data received from the user by the initial state datainput unit 30 and the target state data received from the user by thetarget state data input unit 32.

The result display unit 36 displays results of processing performed bythe server apparatus 10. The result of the processing displayed by theresult display unit 36 may be information representing an optimalsolution of a model data element or a combination of multiple model dataelements selected by the server apparatus 10, information representingcontrol setting values corresponding to the model data element selectedas the optimal solution, or information representing both. The resultdisplay unit 36 may display any number of the model data elements or thecombination of multiple model data elements selected by the serverapparatus 10, in a descending order of a degree of proximity.

The proxel recording unit 20 of the server apparatus 10 stores thevarious model data elements to be described below, each of whichreproduces change of a workpiece and is constructed as an effect ofsemiconductor manufacturing process treatment. The input receiving unit22 receives initial state data and target state data from the clientapparatus 12.

The predicting unit 24 predicts end state data of a workpiece, bysimulating a change of the initial state data of the workpiece caused bythe semiconductor manufacturing process treatment, using the model dataelement or the combination of multiple model data elements stored in theproxel recording unit 20. The determining unit 26 identifies end statedata of the workpiece that is close to the target state data of theworkpiece, from among multiple pieces of end state data of the workpiecepredicted by the predicting unit 24.

The determining unit 26 selects, as the optimal solution, the model dataelement or the combination of multiple model data elements that causesthe workpiece to change to the identified end state data of theworkpiece. The determining unit 26 determines the setting data includedin the model data element selected as the optimal solution, as thecontrol setting values. The setting value output unit 28 outputs thedetermined control setting values to at least one of the clientapparatus 12 and the semiconductor manufacturing apparatus 14. Theoutput by the setting value output unit 28 may include informationindicating the optimal solution of the model data element or thecombination of the multiple model data elements that is determined bythe determining unit 26.

Alternatively, the determining unit 26 may select any number of themodel data elements or any number of the combinations of the multiplemodel data elements, in a descending order of proximity, and may outputthe selected model data elements or the selected combinations of themultiple model data elements to the client apparatus 12. This allows theclient apparatus 12 to display the model data elements or thecombinations of the multiple model data elements by ranking, in thedescending order.

The setting value input receiving unit 40 of the semiconductormanufacturing apparatus 14 receives an input of the control settingvalues from the server apparatus 10. The condition input unit 42controls the semiconductor manufacturing process control unit 44 byinputting, as a condition, the control setting values inputted from theserver apparatus 10. The semiconductor manufacturing process controlunit 44 performs semiconductor manufacturing process treatment based onthe input control setting values.

<Data Example>

Next, data examples related to semiconductor manufacturing processtreatment will be described for ease of understanding of the presentembodiment. FIG. 4 is a block diagram illustrating an example of datarelated to the semiconductor manufacturing process treatment. FIG. 4illustrates initial data, setting data, output data, measured data,experimental data, and target data, as an example of data related to thesemiconductor manufacturing process treatment.

The initial data of FIG. 4 is an example of the initial state data, andincludes:

-   -   Initial CDs (critical dimensions)    -   Material    -   Thickness (thickness)    -   Aspect ratio    -   Mask coverage        Initial data may include three-dimensional structural        information.

The setting data is an example of control setting values, and includes:

-   -   Pressure (pressure in the chamber)    -   Power (power of radio frequency power supply)    -   Gas (gas flow rate)    -   Temperature (temperature in the chamber or temperature on the        surface of the substrate)

The output data is data output from the semiconductor manufacturingapparatus 14, and includes:

-   -   Vpp (potential difference)    -   Vdc (DC self-biasing voltage)    -   OES (light emission intensity by optical emission spectroscopy)    -   Reflect (power of reflected wave)

Measured data is data measured by measuring instruments, and includes:

-   -   Plasma Density    -   Ion energy    -   Ion flux (amount of incident ions)

Experimental data is data obtained by experiments, and includes:

-   -   Etching rate    -   Deposition rate    -   XY position (XY coordinate)    -   Film type    -   Vertical/Lateral (category of direction of reaction)

Target data is an example of target state data, and includes:

-   -   CD (critical dimension)    -   Depth    -   Taper (taper angle)    -   Tilting (tilt angle)    -   Bowing        The target data may include three-dimensional structural        information.

As will be described below, the server apparatus 10 according to thepresent embodiment determines the optimal setting data by inputting theinitial data and the target data.

<Overview of Model Data>

The model data element recorded by the proxel recording unit 20 of theserver apparatus 10 is constructed by utilizing calculated effects withrespect to various types of semiconductor manufacturing processtreatment, as illustrated in FIG. 5. FIG. 5 is an explanatory diagramillustrating an example of a process for calculating an effect of thesemiconductor manufacturing process treatment.

FIG. 5 illustrates that workpieces represented by the initial state dataare changed to workpieces represented by the end state data, byperforming a semiconductor manufacturing process in the semiconductormanufacturing apparatus 14 in which predetermined setting data is inputas the control setting values. Then, the effect of the semiconductormanufacturing process can be expressed by a difference between theinitial state data of the workpieces and the end state data of theworkpieces. The execution status of the semiconductor manufacturingprocess at this time can be specified by the output data, the measureddata, and the experimental data.

The proxel recording unit 20 of the server apparatus 10 records themodel data element, which is the effect of the semiconductormanufacturing process calculated in the above-described manner that isassociated with the setting data, the output data, the measured data,and the experimental data.

<Prediction Method for Change in Workpiece State Data>

FIGS. 6A and 6B are explanatory diagrams illustrating examples ofmethods for predicting change in state data of a workpiece. Asillustrated in FIGS. 6A and 6B, there are two methods for predicting thestate data change of the workpiece. One method is using the measureddata, and the other method is using the experimental data.

FIG. 6A illustrates a method of predicting end data by using shapesimulation software and measured data. In the method of FIG. 6A,measured data is required to predict change in state data of aworkpiece. However, because the measured data is measured usingmeasuring instruments, there is a problem that an error of a measurementsystem is included.

FIG. 6B illustrates a method of predicting end data by using shapemodeling software and experimental data. In the method of FIG. 6B,experimental data is required to predict change in state data of aworkpiece. That is, in the method of FIG. 6B, the shape modelingsoftware predicts change in state data of the workpiece by usingexperimental data acquired in the past.

In the present embodiment, the method illustrated in FIG. 6B is employedin which improving accuracy of prediction of change in state data of aworkpiece is not required. In the method of FIG. 6B, the model dataelement reproduces change of the workpiece from an initial state to anend state that occurs by performing the semiconductor manufacturingprocess. However, if the model data element according to the presentembodiment can be generated, the method of FIG. 6A may be employed.

<Process>

<<Process in Server Apparatus>>

FIG. 7 is a flowchart illustrating an example of a process performed inthe server apparatus. At step S11, the input receiving unit 22 of theserver apparatus 10 receives the initial state data and the target statedata from the client apparatus 12. Next, the process proceeds to stepS12, and the predicting unit 24 reads out a model data element or acombination of multiple model data elements to be used, from the proxelrecording unit 20. The readout of the model data element or thecombination of the multiple model data elements to be used may beperformed by a brute-force approach, may be performed randomly for apredetermined number of times, or may be performed until the proximityreaches an acceptable value.

FIGS. 8A and 8B are schematic diagrams each illustrating an example of aprocess of reading out combinations of multiple model data elements. InFIGS. 8A and 8B, model data is denoted by “Proxel”. FIG. 8A is anexample in which each combination consists of five model data elements.FIG. 8B is an example in which each combination consists of six modeldata elements. As illustrated in FIGS. 8A and 8B, a combination of themultiple model data elements may include multiple pieces of the samemodel data element.

Further, the process of reading out a combination of multiple model dataelements may be performed as illustrated in FIG. 9. FIG. 9 is aschematic diagram illustrating an example of the process of reading outa combination of multiple model data elements. FIG. 9 is an example of acase of reading out combinations each consisting of three model dataelements, in which the first model data “Proxel A” and the third modeldata “Proxel C” are directly designated by the user. In the example ofFIG. 9, different combinations of multiple model data elements are readby inserting or switching the second model data element.

The process proceeds to step S13. At step S13, the predicting unit 24predicts the end state data of the workpiece, by simulating a change ofthe initial state data of the workpiece by the semiconductormanufacturing process treatment using the model data element or thecombination of the multiple model data elements that is/are read outfrom the proxel recording unit 20 at step S12.

For example, in a case in which a single model data element is read outat step S12, as illustrated in FIG. 10, the single model data element isused to predict the end state data of the workpiece from the initialstate data. FIG. 10 is a schematic diagram of an example of a predictionprocess. Because the model data element is associated with the effect ofa predetermined semiconductor manufacturing process, a workpiece 1311 ofend state data when a workpiece 1301 of initial state data is input canbe predicted. Similarly, a workpiece 1312 of end state data when aworkpiece 1302 of initial state data is input can be predicted. Asdescribed above, if there are multiple initial state data eachrepresenting, for example, a different shape, different end state dataaccording to each initial state data can be predicted, by using themodel data element according to the present embodiment.

In a case in which a combination of multiple model data elements is readat step S12, the end state data of the workpiece is predicted from theinitial state data of the workpiece by using the multiple model dataelements sequentially from the beginning. As the initial state data ofthe second model data element, the end state data generated by the modeldata element just before the second model data element is used.Similarly, as the initial state data of a model data element that issubsequent to the second model data element, the end state datagenerated by a model data element just before said model data element isused. As described above, the predicting unit 24 predicts the end statedata of the workpiece using the model data element or the combination ofmultiple model data elements that is/are read out of the proxelrecording unit 20 in step S12.

The process proceeds to step S14. At step S14, the determining unit 26calculates a degree of proximity (or a degree of deviation) between theend state data of the workpiece predicted by the predicting unit 24 atstep S13 and the target state data received at step S11.

The process proceeds to step S15. The predicting unit 24 and thedetermining unit 26 repeat steps S12 to S15 until the reading of allmodel data elements and all combinations of multiple model data elementis completed. After the predicting unit 24 and the determining unit 26complete reading out of the all model data elements and the allcombinations of multiple model data element, the process proceeds tostep S16. At step S16, the model data element or the combination ofmultiple model data elements having the largest proximity (or thesmallest deviation) calculated at step S14 can be selected as theoptimal solution.

In a case in which the readout of the combination of the multiple modeldata elements is to be performed randomly for a predetermined number oftimes, the repeated execution of steps S12 to S15 is performed until thenumber of the readouts reaches the predetermined number. In a case inwhich the readout of the combination of the multiple model data elementsis to be performed until the proximity reaches an acceptable value, therepeated execution of steps S12 to S15 is performed until the acceptableproximity is calculated.

In the process described in the flow chart of FIG. 7, as the number ofmodel data elements recorded in the proxel recording unit 20 of theserver apparatus 10 increases, the number of model data elements or thenumber of combinations of multiple model data elements that are to beread out in step S12 increases, and time required for selecting theoptimal solution becomes longer. Accordingly, the process performed atstep S12, which reads out, from the proxel recording unit 20, model dataelements or combinations of multiple model data elements to be used, maybe configured to improve efficiency of search for the optimal solution,by machine learning using the difference calculated in step S14 as anevaluation value. Tree search, graph search, meta-heuristics, or acombination of these may be used for searching for the optimal solution.Additionally, in order to search for the optimal solution, reinforcementlearning may be used to learn the policy of selecting a semiconductormanufacturing process for obtaining end state data close to the targetstate data.

For example, a method of searching for an optimal solution using agenetic algorithm based on results of step S14 in FIG. 7 may beperformed, or search (reinforcement learning) may be performed by usingthe degree of deviation from the target state data as reward criterion.Alternatively, by learning a relationship between a difference from thetarget state data and a process condition of the semiconductormanufacturing process treatment, search (reinforcement learning) may beperformed by using the degree of deviation from the target state data asa reward criterion.

<Proxel>

As the model data element recorded by the proxel recording unit 20 ofthe server apparatus 10, for example, the following proxel may be used.The proxel is a minimum data unit (process element) in process treatmentapplied to a workpiece, and designation of the proxel is similar to thedesignation of a minimum unit (Picture Element) of an image, which isreferred to as a “pixel”, or the designation of a minimum unit (VolumeElement) of a solid, which is referred to as a “voxel”.

The proxel is defined as a minimum unit of process conditions, underwhich an effect (change in state data) of semiconductor manufacturingprocess treatment applied to a workpiece is uniquely determined in theprocess condition space. With respect to the model data elementaccording to the present embodiment, if it is known that use of multipleproxels brings about a certain effect, the multiple proxels may betreated collectively.

OTHER EMBODIMENTS

In the first embodiment, an example of specifying a single initial statedata piece and a single target state data piece has been described.However, multiple initial state data pieces and multiple target statedata pieces may be specified, and proximities of the respective data maybe used as indicators, so as to deal with the loading effect or to aimat in-plane uniformity.

For an objective of loading effect or in-plane uniformity, the initialstate data and the target state data need to be specified for everydifferent pattern profile, or for every different section(center/middle/edge, etc.) of a substrate. For an objective of loadingeffect or in-plane uniformity, multiple proximities are used asindicators from among the obtained proximities.

In the first embodiment, the determining unit 26 selects, as the optimalsolution, a model data element or a combination of multiple model dataelements having the largest proximity (or the smallest deviation)calculated at step S14, but may accept judgment or an operation by aperson. For example, the determining unit 26 may output multiple processcondition candidates based on the proximity, and may receive judgment oran operation by a person for finally narrowing down the processcondition from the multiple process conditions candidates.

In a case in which a judgment criterion specified by a user (humanjudgment) is stored in advance, the determining unit 26 includes afunction to finally determine the process condition from the multipleprocess condition candidates based on the judgment criterion specifiedin advance by a user. Meanwhile, in a case in which a selectionoperation by a user (human operation) is received, the determining unit26 includes a function for displaying the multiple process conditioncandidates on the client apparatus 12, and for receiving, from a user,final selection of the process condition.

SUMMARY

As described above, according to the present embodiment, based on theinput of the initial state data and the target state data such as thestructural information of the workpiece, the optimal model data elementor the optimal combination of the model data elements can beautomatically retrieved from the accumulated model data elements, andthe candidate of the process condition such as the control settingvalues input to the semiconductor manufacturing apparatus 14 can beproposed to a user. FIG. 11 is a schematic diagram illustrating anexample of the process performed in the server apparatus 10 according tothe present embodiment.

Further, according to the present embodiment, by inputting dataincluding material information of a workpiece and three-dimensionalstructural information of the workpiece before and after thesemiconductor manufacturing process treatment that is modeled by, forexample, shape modeling software, amount of information input by a userincreases, and shape processing and surface treatment approximating tothe target state data can be realized with greater accuracy. In thepresent embodiment, the shape of the workpiece may include anarrangement of a micro area (e.g., arrangement of atoms) or a state(e.g., reaction with a gas).

The present invention is not limited to the above disclosed embodiments,and various modifications and variations are possible without departingfrom the scope of the claims. Needless to say, the informationprocessing system 1 described in the present embodiment is an example,and there are various system configuration examples depending onapplications and purposes.

This application is based on and claims priority to Japanese PatentApplication No. 2018-21058 filed on Feb. 8, 2018, the entire contents ofwhich are incorporated herein by reference.

DESCRIPTION OF REFERENCE SYMBOLS

-   1 information processing system-   10 server apparatus-   12 client apparatus-   14 semiconductor manufacturing apparatus-   16 network-   20 proxel recording unit-   22 input receiving unit-   24 predicting unit-   26 determining unit-   28 setting value output unit-   30 initial state data input unit-   32 target state data input unit-   34 data transmitting unit-   36 result display unit-   40 setting value input receiving unit-   42 condition input unit-   44 semiconductor manufacturing process control unit

1-14. (canceled)
 15. An information processing device comprising: aprocessor, and a memory device storing a computer program that causesthe processor to execute processes including storing a plurality ofmodel data elements each of which reproduces a change in state data of aworkpiece, each of the model data elements being constructed, as aneffect of a minimum unit of process treatment, from differential databetween initial state data of a plurality of workpieces and end statedata of the plurality of workpieces, the end state data of the pluralityof workpieces being the state data of the plurality of workpieces towhich the minimum unit of the process treatment is applied under apredetermined process condition; receiving an input of the initial statedata of an objective workpiece and target end state data of theobjective workpiece; predicting, for a plurality of combinations of theplurality of model data elements, end state data of the objectiveworkpiece from the initial state data of the objective workpiecereceived, by using a corresponding combination of the plurality ofcombinations of the plurality of model data elements; selecting acombination of the plurality of model data elements based on a proximitybetween the predicted end state data of the objective workpiece and thetarget end state data of the objective workpiece received; anddetermining a process condition of process treatment to be applied tothe objective workpiece, based on the selected combination of theplurality of model data elements.
 16. The information processing deviceaccording to claim 15, wherein the initial state data of the objectiveworkpiece includes a plurality of initial state data pieces of theobjective workpiece; the target end state data of the objectiveworkpiece includes a plurality of target end state data pieces of theobjective workpiece; and the combination of the plurality of model dataelements is selected based on a plurality of proximities between thepredicted end state data of the objective workpiece and the plurality ofthe target end state data pieces of the objective workpiece.
 17. Theinformation processing device according to claim 15, wherein the statedata of the workpiece includes structural information of the workpieceand material information of the workpiece, and each of the model dataelements reproduces a change in the structural information of theworkpiece and a change in the material information of the workpiece. 18.The information processing device according to claim 15, wherein theprocess condition includes a setting value for a control component in aprocess treatment executing device that applies the minimum unit of theprocess treatment to the workpiece.
 19. The information processingdevice according to claim 18, wherein the determined process conditionof the process treatment to be applied to the objective workpieceincludes the setting value for the control component in the processtreatment executing device, and the processes further include outputtingthe setting value for the control component in the process treatmentexecuting device, based on the determined process condition of theprocess treatment to be applied to the objective workpiece.
 20. Theinformation processing device according to claim 15, wherein, in thereceiving of the input, the initial state data of the objectiveworkpiece and the target end state data of the objective workpiece thatare output from software capable of designing at least a shape of theobjective workpiece are received.
 21. The information processing deviceaccording to claim 15, wherein the predicting includes predicting, forevery combination of the plurality of model data elements recorded, theend state data of the objective workpiece from the initial state data ofthe objective workpiece received; and the combination of the pluralityof model data elements is selected based on the predicted end state dataof the objective workpiece having a largest proximity to the target endstate data of the objective workpiece.
 22. The information processingdevice according to claim 15, wherein the predicting includes searchingfor an optimal solution from among the combinations of the plurality ofmodel data elements recorded, by machine learning using, as anevaluation value, a difference between the predicted end state data ofthe objective workpiece and the target end state data of the objectiveworkpiece.
 23. The information processing device according to claim 15,wherein the selecting includes determining a plurality of processcondition candidates based on the proximity, and the combination of theplurality of model data elements is selected from among the plurality ofprocess condition candidates, based on a judgement criterion specifiedand stored by a user in advance.
 24. The information processing deviceaccording to claim 15, wherein the selecting includes determining aplurality of process condition candidates based on the proximity;providing a user with the plurality of process condition candidates;receiving, from the user, a selection of a process condition from amongthe plurality of process condition candidates; and selecting thecombination of the plurality of model data elements based on theselection of the process condition.
 25. The information processingdevice according to claim 15, wherein the process treatment issemiconductor manufacturing process treatment.
 26. A process treatmentexecuting device that applies process treatment to a workpiece, theprocess treatment executing device comprising: a processor, and a memorydevice storing a computer program that causes the processor to executeprocesses including storing a plurality of model data elements each ofwhich reproduces a change in state data of a workpiece, each of themodel data elements being constructed, as an effect of a minimum unit ofprocess treatment, from differential data between initial state data ofa plurality of workpieces and end state data of the plurality ofworkpieces, the end state data of the plurality of workpieces being thestate data of the plurality of workpieces to which the minimum unit ofthe process treatment is applied under a predetermined processcondition; receiving an input of the initial state data of an objectiveworkpiece and target end state data of the objective workpiece;predicting, for a plurality of combinations of the plurality of modeldata elements, end state data of the objective workpiece from theinitial state data of the objective workpiece received, by using acorresponding combination of the plurality of combinations of theplurality of model data elements; selecting a combination of theplurality of model data elements based on a proximity between thepredicted end state data of the objective workpiece and the target endstate data of the objective workpiece received; and determining aprocess condition of process treatment to be applied to the objectiveworkpiece, based on the selected combination of the plurality of modeldata elements.
 27. An information processing system comprising: aprocess treatment executing device configured to apply process treatmentto a workpiece, and an information processing device configured todetermine the process treatment and a process condition that are appliedby the process treatment executing device to the workpiece, theinformation processing device including a processor, and a memory devicestoring a computer program that causes the processor to executeprocesses including storing a plurality of model data elements each ofwhich reproduces a change in state data of a workpiece, each of themodel data elements being constructed, as an effect of a minimum unit ofprocess treatment, from differential data between initial state data ofa plurality of workpieces and end state data of the plurality ofworkpieces, the end state data of the plurality of workpieces being thestate data of the plurality of workpieces to which the minimum unit ofthe process treatment is applied under a predetermined processcondition, receiving an input of the initial state data of an objectiveworkpiece and target end state data of the objective workpiece;predicting, for a plurality of combinations of the plurality of modeldata elements, end state data of the objective workpiece from theinitial state data of the objective workpiece received, by using acorresponding combination of the plurality of combinations of theplurality of model data elements; selecting a combination of theplurality of model data elements based on a proximity between thepredicted end state data of the objective workpiece and the target endstate data of the objective workpiece received; and determining aprocess condition of process treatment to be applied to the objectiveworkpiece, based on the selected combination of the plurality of modeldata elements.